单晶炉/多晶炉用碳碳加热器具有强度高、耐硅蒸气腐蚀能力强抗热震性能优异，是单晶硅炉中重要的加热元件。与传统石墨加热器相比，碳碳加热器具有更优越的力学性能和更长的服役寿命等优势。

Carbon carbon heaters for single crystal/polycrystal-line furnaces is an important heating element in singlecrystal silicon furnace, because of its high strength, strongresistance to silicon vapor corrosion and excellent ther-mal shock resistance. Compared with traditional graphiteheaters, C/C heaters have the advantages of superior me-chanical properties and longer service life